On the deformation mechanism of SiC under nanoscratching: An ...
WEBJun 1, 2023 · 1. Introduction. Silicon carbide (SiC) is considered the thirdgeneration semiconductor and is an important material for chips, power devices and core components in other electronics, because of its excellent performance under working conditions such as high temperature, high pressure or high frequency [[1], [2], [3]].SiC is also one of the .